Physical characterization of molybdenum microtips field emitter arrays
نویسندگان
چکیده
منابع مشابه
Design, Fabrication and Characterization of Molybdenum Field Emitter Arrays (Mo-FEAs)
We report on the fabrication of highly uniform field emitter arrays (FEAs) with an integrated self-aligned extraction gate from bulk molybdenum. All critical dimensions of the emitter tip were determined by a single process step of Inductively Coupled Plasma (ICP) etching. In addition, the height difference between the emitter tip and the gate plane was controlled by the thickness of the SiO2 d...
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ژورنال
عنوان ژورنال: Journal of Physics D: Applied Physics
سال: 2010
ISSN: 0022-3727,1361-6463
DOI: 10.1088/0022-3727/43/6/065501